I was having this same problem. However, the difference was it was with a single custom module. The original author changed the extension of the license and release notes files to HTML (by default they're text files). I decided to revert them back and update the .dnn file to reflect which files to look for. However, this didn't work. Even after completely uninstalling the module and reinstalling it failed. It wasn't until I reverted back to an HTML file extension would the install work. I'd like to know how DNN retains information on deleted modules. I can see that being a problem in the future if one were to do an overhaul of a project and changed/removed the files.
Hope that helps someone.

This also happened to me when I used a package version number that Dnn doesn't like:

Failed with the following:


Changed it to this and it worked: